Maex, K. ; Lauwers, A. ; Van Hove, M. ; Vandervorst, W. ; Van Rossum, M.
Pub. info.:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.869-874, 1993. Pittsburgh, Pa.. Materials Research Society
De Boeck, J. ; Alay, J. ; vanhellemont, J. ; Brijs, B. ; Vandervorst, W. ; Borghs, G. ; Blondeel, M. ; Vinkier, C.
Pub. info.:
Heteroepitaxy of dissimilar materials : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A.. pp.411-416, 1991. Pittsburgh, Pa.. Materials Research Society
Verhaverbeke, S. ; Alay, J. ; Mertens, P. ; Meuris, M. ; Heyns, M. ; Vandervorst, W. ; Murrell, M. ; Sofield, C.
Pub. info.:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.391-398, 1992. Pittsburgh, Pa.. Materials Research Society
Symons, J. ; Nijs, J. ; Vanhellemont, J. ; Baert, K. ; Michiel, H. ; Willeke, G. ; Vandervorst, W. ; Mertens, R.
Pub. info.:
Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A.. pp.621-626, 1987. Pittsburgh, Pa.. Materials Research Society
Boeck, De J. ; Dobbelaere, W. ; Van Hove, M. ; Vanhellemont, J. ; De Raedt, W. ; Vandervorst, W. ; Mertens, R. ; Borghs, G.
Pub. info.:
Epitaxial heterostructures : symposium held April 16-19, 1990, San Francisco, California, U.S.A.. pp.147-152, 1990. Pittsburgh, Pa.. Materials Research Society
Caymax, Matty R. ; Poortmans, J. ; Van Ammel, A. ; Vandervorst, W. ; Vanhellemont, J. ; Nijs, J.
Pub. info.:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.461-466, 1992. Pittsburgh, Pa.. Materials Research Society
Teerlinck, I. ; Schmidt, H.F. ; Rotondaro, A.L.P. ; Hurd, T.Q. ; Mouche, L. ; Mertens, P.W. ; Meuris, M. ; Heyns, M.M. ; Vanhaeren, D. ; Vandervorst, W.
Pub. info.:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.284-291, 1995. Pennington, NJ. Electrochemical Society
Kim, Y.B. ; Conard, T. ; Vanhaeren, D. ; Baklanov, M. ; Vanhaelemeersch, S. ; Vandervorst, W. ; Maex, K.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.610-616, 1997. Pennington, NJ. Electrochemical Society
Caymax,. Matty R. ; Poortmans, J. ; Van Ammel, A. ; Nijs, J. ; Vandervorst, W. ; Vanhellemont, J. ; Brijs, B.
Pub. info.:
Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A.. pp.85-90, 1992. Pittsburgh, PA. Materials Research Society
Eneman, G. ; Simoen, E. ; Lauwers, A. ; Lindsay, R. ; Verheyen, P. ; Delhougne, R. ; Loo, R. ; Caymax, M. ; Meunier-Beillard, P. ; Demuynck, S. ; Meyer, K.De ; Vandervorst, W.
Pub. info.:
High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.187-192, 2004. Warrendale, Pa.. Materials Research Society
Rotondaro, A.L.P. ; Meuris, M. ; Schmidt, H.F. ; Heyns, M.M. ; Vandervorst, W. ; Claeys, C. ; Hellemans, L. ; Snauvaert, I.
Pub. info.:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.581-586, 1994. Pennington, NJ. Electrochemical Society
Pawlak, M. ; Kittl, J. A. ; Janssens, T. ; Lauwers, A. ; Vandervorst, W. ; Anil, K. G. ; Schram, T. ; Veloso, A. ; van Dal, M.J. H. ; Maex, K. ; Vantomme, A.
Pub. info.:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.241-248, 2005. Pennington, NJ. Electrochemical Society
Kenens, C. ; De Gendt, S. ; Knotter, D.M. ; Loewenstein, L.M. ; Meuris, M. ; Vandervorst, W. ; Heyns, M.M.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.247-255, 1997. Pennington, NJ. Electrochemical Society
Tsai, W. ; Chen, I. ; Carter, R. ; Cartier, E. ; Kluth, J. ; Richard, O. ; Claes, M. ; Lin, Y.M. ; Nohira, H. ; Conard, T. ; Caymax, M. ; Young, E. ; Vandervorst, W. ; DeGendt, S. ; Heyns, M. ; Manabe, Y. ; Maes, J.W. ; Rittersma, Z.M. ; Besling, W. ; Roozeboom, F.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.747-760, 2002. Pennington, NJ. Electrochemical Society
Kaushik, V. ; De Gendt, S. ; Caymax, M. ; Young, E. ; Rohr, E. ; Van Elshocht, S. ; Delabie, A. ; Claes, M. ; Shi, X. ; Chen, I. ; Carter, R. ; Conard, T. ; Vandervorst, W. ; Schaekers, M. ; Heyns, M.
Pub. info.:
ULSI Process Integration : proceedings of the International Symposium. pp.391-396, 2003. Pennington, N.J.. Electrochemical Society
Pereira, R. ; Hove, M. Van ; Raedt, W. De ; Alay, J. ; Bender, H. ; Vandervorst, W. ; Borghs, G. ; Rossum, M. Van
Pub. info.:
III-V electronic and photonic device fabrication and performance : symposium held April 12-15, 1993, San Francisco, California, U.S.A.. pp.211-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Conard, T. ; Witte, H. De ; Vandervorst, W. ; Houssa, M. ; Heyns, M. ; Pomarede, C. ; Werkhoven, C.
Pub. info.:
Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.. pp.69-, 2000. Warrendale, PA. MRS-Materials Research Society
Clarysse, T. ; Vandervorst, W. ; Lindsay, R. ; Borden, P. ; Budiarto, E. ; Madsen, J. ; Nijmeijer, R.
Pub. info.:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.285-290, 2002. Warrendale, Pa.. Materials Research Society
Eyben, P. ; Fouchier, M. ; Albart, P. ; Charon-Verstappen, J. ; Vandervorst, W.
Pub. info.:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.297-302, 2002. Warrendale, Pa.. Materials Research Society
Vandervorst, W. ; Janssens, T. ; Brijs, B. ; Lindsay, R. ; Collart, E.J.H. ; Kirkwood, David A. ; Mathot, G. ; Terwagne, G.
Pub. info.:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.277-284, 2002. Warrendale, Pa.. Materials Research Society
Pawlak, B.J. ; Vandervorst, W. ; Lindsay, R. ; Wolf, I.De ; Roozeboom, F. ; Delhougne, R. ; Benedetti, A. ; Loo, R. ; Caymax, M. ; Maex, K. ; Cowern, N.E.B.
Pub. info.:
High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.281-286, 2004. Warrendale, Pa.. Materials Research Society
Vandervorst, W. ; Pawlak, B.J. ; Janssens, T. ; Brijs, B. ; Delhougne, R. ; Caymax, M. ; Loo, R.
Pub. info.:
High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.273-280, 2004. Warrendale, Pa.. Materials Research Society
Pawlak, B.J. ; Vandervorst, W. ; Lindsay, R. ; Wolf, I.De ; Roozeboom, F. ; Delhougne, R. ; Benedetti, A. ; Loo, R. ; Caymax, M. ; Maex, K. ; Cowern, N.E.B.
Pub. info.:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.423-430, 2004. Warrendale, Pa.. Materials Research Society
Vandervorst, W. ; Pawlak, B.J. ; Janssens, T. ; Brijs, B. ; Delhougne, R. ; Caymax, M. ; Loo, R.
Pub. info.:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.415-422, 2004. Warrendale, Pa.. Materials Research Society
Brijs, B. ; Bender, H. ; Huyghebaert, C. ; Janssens, T. ; Vandervorst, W. ; Nakajima, K. ; Kimura, K. ; Bergmaier, A. ; Dollinger, G. ; van den Berg, J.A.
Pub. info.:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.50-62, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Loo, R. ; Meunier-Beillard, P. ; Delhougne, R. ; Koumoto, T. ; Geenen, L. ; Brijs, B. ; Vandervorst, W.
Pub. info.:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.329-338, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Duhayon, N. ; Clarysse, T. ; Alvarez, D. ; Eyben, P. ; Fouchier, M. ; Vandervorst, W. ; Hellemans, L.
Pub. info.:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.293-304, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Bender, H. ; Conard, T. ; Richard, O. ; Brijs, B. ; Petry, J. ; Vandervorst, W. ; Defranoux, C. ; Boher, P. ; Rochat, N. ; Wyon, C. ; Mack, P. ; Wolstenholme, J. ; Vitchev, R. ; Houssiau, L. ; Pireaux, J-J. ; Bergmaier, A. ; Dollinger, G.
Pub. info.:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.223-232, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
De Gendt, S. ; Brunco, D. ; Caymax, M. ; Canard, T. ; Date, L. ; Delabie, A. ; Deweerd, W. ; Groeseneken, G. ; Houssa, M. ; Hyun, S. ; Kaushik, V. ; Kubicek, S. ; Maes, J. ; Pantisano, L. ; Ragnarsson, L. ; Rohr, E. ; Schram, T. ; Shimamoto, Y. ; Sleeckx, E. ; Vandervorst, W. ; Van Elshocht, S. ; Yamamoto, K. ; Witters, T. ; Zhao, C. ; Zimmerman, P. ; Heyns, M. (Invited Paper)
Pub. info.:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.109-117, 2005. Pennington, NJ. Electrochemical Society
Lauwers, A. ; Maex, K. ; Vandervorst, W. ; Brijs, G. ; Poortmans, J. ; Caymax, M. ; Vanhellemont, J. ; Petersson, S.
Pub. info.:
Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.299-304, 1992. Pittsburgh, Pa.. Materials Research Society
Satta, A. ; Simoen, E. ; Janssens, T. ; Benedetti, A. ; Clarysse, T. ; De Jaeger, B. ; Geenen, L. ; Brijs, B. ; Meuris, M. ; Vandervorst, W.
Pub. info.:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France. pp.52-60, 2005. Pennington, N.J.. Electrochemical Society
Satta, A. ; Simoen, E. ; Meuris, M. ; Janssens, T. ; Clarysse, T. ; Demeurisse, C. ; Hoflijk, I. ; Vandervorst, W.
Pub. info.:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.468-475, 2005. Pennington, NJ. Electrochemical Society
Lao, R. ; Meunier-Beillard, P. ; Koumoto, R.Deihougne.T. ; Geenen, L. ; Brijs, B. ; Vandervorst, W.
Pub. info.:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.329-338, 2003. Pennington, NJ. Electrochemical Society
Lindsay, R. ; Pawlak, B. ; Kittl, J. ; Henson, K. ; Torregiani, C. ; Giangrandi, S. ; Surdeanu, R. ; Vandervorst, W. ; Mayur, A. ; Ross, J. ; McCoy, S. ; Gelpey, J. ; Elliott, K. ; Pages, X. ; Satta, A. ; Lauwers, A. ; Stolk, P. ; Maex, K.
Pub. info.:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.261-266, 2003. Warrendale, Pa.. Materials Research Society
Eyben, P. ; Duhayon, N. ; Stuer, C. ; De Wolf, T. ; Rooyackers, R. ; Clarysse, T. ; Vandervorst, W. ; Badenes, V.
Pub. info.:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B2.2-, 2001. Warrendale, PA. Materials Research Society
Vandervorst, W. ; Brijs, B. ; Bender, H. ; Conard, O.T. ; Petry, J. ; Richard, O. ; Elshocht, S.Van ; Delabie, A. ; Caymax, M. ; Gendt, S.De
Pub. info.:
Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.. pp.23-34, 2003. Warrendale, Pa.. Materials Research Society
Zhao, C. ; Cosnier, V. ; Chen, P.J. ; Richard, O. ; Roebben, G. ; Maes, J. ; Elshocht, S.Van ; Bender, H. ; Young, E. ; Biest, O.Van Der ; Caymax, M. ; Vandervorst, W. ; Gendt, S.De ; Heyns, M.
Pub. info.:
Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.. pp.9-14, 2003. Warrendale, Pa.. Materials Research Society
Eyben, P. ; Duhayon, N. ; Stuer, C. ; Wolf, I. De ; Rooyackers, R. ; Clarysse, T. ; Vandervorst, W. ; Badenes, G.
Pub. info.:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society
Elshocht, S.Van ; Caymax, M. ; Gendt, S.De ; Conard, T. ; Petry, J. ; Claes, M. ; Witters, T. ; Zhao, C. ; Brijs, B. ; Richard, O. ; Bender, H. ; Vandervorst, W. ; Carter, R. ; Kluth, J. ; Date, L. ; Pique, D. ; Heyns, M.M.
Pub. info.:
Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.. pp.197-202, 2003. Warrendale, Pa.. Materials Research Society
Green, M.L ; Canard, T. ; Brijs, B. ; Ho, M.-Y. ; Wilk, G.D. ; Rdisiinen, P.I. ; Sorsch, T. ; Vandervorst, W.
Pub. info.:
Rapid thermal and other short-time processing technologies III : proceedings of the international symposium. pp.177-188, 2002. Pennington, NJ. Electrochemical Society
Petry, J. ; Vandervorst, W. ; Richard, O. ; Conard, T. ; DeWolf, P. ; Kaushik, V. ; Delabie, A. ; Elshocht, S.Van
Pub. info.:
Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.. pp.203-210, 2004. Warrendale, Pa.. Materials Research Society
Bender, H. ; Brijs, B. ; Peby, J. ; Vandervorst, W. ; Defranoux, C. ; Boher, P. ; Rochat, N. ; Wyon, C. ; Mack, P. ; Woistenholme, I. ; Vitchev, R. ; Houssiau, L. ; Pireaux, J.-J. ; Bergmaier, A. ; Dollinger, G. ; Conard, T. ; Richard, O.
Pub. info.:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.223-232, 2003. Pennington, NJ. Electrochemical Society
Eneman, G. ; Simoen, E. ; Delhougne, R. ; Verheyen, P. ; Ries, M. ; Loo, R. ; Caymax, M. ; Vandervorst, W. ; De Meyer, K.
Pub. info.:
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.119-124, 2005. Warrendale, Pa.. Materials Research Society
Caymax, Matty ; Bender, H. ; Brijs, B. ; Conard, T. ; Gendt, S. De ; Delabie, A. ; Heyns, M. ; Onsia, B. ; Ragnarsson, L. ; Richard, O. ; Vandervorst, W. ; Elshocht, S. Van ; Zhao, C. ; Maes, J. W. ; Date, L. ; Pique, D. ; Young, E. ; Tsai, W. ; Shimamoto, Y.
Pub. info.:
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.47-58, 2003. Warrendale, Pa.. Materials Research Society
Tsai, W. ; Chen, I. ; Carter, R. ; Cartier, E. ; Kluth, J. ; Richard, O. ; Claes, M. ; Lin, Y.M. ; Nohira, H. ; Conard, T. ; Caymax, M. ; Young, E. ; Vandervorst, W. ; DeGendt, S. ; Heyns, M. ; Manabe, Y. ; Maes, J.W. ; Rittersma, Z.M. ; Besling, W. ; Roozeboom, F.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.747-760, 2002. Pennington, NJ. Electrochemical Society
Detavernier, Christophe ; Van Meirhaeghe, Roland L. ; Cardon, Felix ; Maex, K. ; Brijs, B. ; Vandervorst, W.
Pub. info.:
Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A.. pp.C10.2-, 2001. Warrendale, PA. Materials Research Society
Loo, R. ; Delhougne, R. ; Meunier-Beillard, P. ; Caymax, M. ; Verheyen, P. ; Eneman, G. ; Wolf, I.De ; Janssens, T. ; Benedetti, A. ; Meyer, K.De ; Vandervorst, W. ; Heyns, M.
Pub. info.:
High-mobility group-IV materials and devices : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.3-14, 2004. Warrendale, Pa.. Materials Research Society
Delabie, Annelies ; Caymax, M. ; Maes, J.W. ; Bajolet, P. ; Brijs, B. ; Cartier, E. ; Conard, T. ; Gendt, S.De ; Richard, O. ; Vandervorst, W. ; Zhao, C. ; Green, M. ; Tsai, W. ; Heyns, M.M.
Pub. info.:
Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.. pp.179-184, 2003. Warrendale, Pa.. Materials Research Society
De Wolf, P. ; Trenkler, T. ; Clarysse, T. ; Vandervorst, W.
Pub. info.:
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices. pp.92-101, 1997. Pennington, NJ. Electrochemical Society
Chollet, F. ; Caymax, M. ; Vandervorst, W. ; Andre, E.
Pub. info.:
ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.263-270, 1995. Pennington, NJ. Electrochemical Society
ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.252-252, 1995. Pennington, NJ. Electrochemical Society