Higashi, Y. ; Takaie, Y. ; Endo, K. ; Kume, T. ; Enami, K. ; Yamauchi, K. ; Yamamura, K. ; Sano, H. ; Ueno, K. ; Mori, Y.
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Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA. pp.592107-592107, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Higashi, Y. ; Takaie, Y. ; Endo, K. ; Kume, T. ; Enami, K. ; Yamauchi, K. ; Yamamura, K. ; Sano, H. ; Uchikoshi, J. ; Ueno, K. ; Mori, Y.
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Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA. pp.63170B-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Guan, J. ; Gale, G. ; Bersuker, G. ; Jeon, Y. ; Nguyen, B. ; Barnett, J. ; Jackson, M. ; Burkman, D. ; Peavey, P. ; Yokomizo, K. ; Ueno, K. ; Yamasaka, M. ; Imai, M. ; Kitahara, S. ; Shindo, N.
Pub. info.:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.77-83, 1999. Pennington, NJ. Electrochemical Society
Gross, M. E. ; Lingk, C. ; Siegrist, T. ; Coleman, E. ; Brown, W. L. ; Ueno, K. ; Tsuchiya, Y. ; Itoh, N. ; Ritzdorf, T. ; Turner, J. ; Gibbons, K. ; Klawuhn, E. ; Biberger, M. ; Lai, W. Y. C. ; Miner, J. F. ; Wu, G. ; Zhang, F.
Pub. info.:
Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.293-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Ueno, K. ; Donnelly, V. M. ; Tsuchiya, Y. ; Aoki, H.
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Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.521-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Rumaner, Lee E. ; Gray, J. L. ; Ohuchi, F. S. ; Ueno, K. ; Koma, A.
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Structure and properties of multilayered thin films : symposium held April 17-19, 1995, San Francisco, California, U.S.A.. pp.101-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Koshida, N. ; Nakajima, T. ; Yoshiyama, M. ; Ueno, K. ; Nakagawa, T. ; Shinoda, H.
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Microcrystalline and nanocrystalline semiconductors--1998 : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.. pp.105-, 1999. Warrendale, PA. MRS - Materials Research Society
Tsuji, T. ; Izumi, S. ; Ueda, A. ; Fujisawa, H. ; Ueno, K. ; Tsuchida, H. ; Kamata, I. ; Jikimoto, T. ; Izumi, K.
Pub. info.:
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.1141-1144, 2002. Zuerich, Switzerland. Trans Tech Publications
Fujisawa, H. ; Tsuji, T. ; Izumi, S. ; Ueno, K. ; Kamata, I. ; Tsuchida, T. ; Jikimoto, T. ; Izumi, K.
Pub. info.:
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.1297-1300, 2002. Zuerich, Switzerland. Trans Tech Publications
Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Ueno, K. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T.
Pub. info.:
X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA. pp.58-64, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.1101-1104, 2000. Zuerich, Switzerland. Trans Tech Publications
Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999. pp.1195-1198, 2000. Zuerich, Switzerland. Trans Tech Publications
Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Matsuyama, S. ; Yumoto, H. ; Ueno, K. ; Shibahara, M. ; Endo, K. ; Yabashi, M. ; Tamasaku, K. ; Nishino, Y. ; Ishikawa, T. ; Mori, Y.
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Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA. pp.116-123, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Mimura, H. ; Yumoto, H. ; Matsuyama, S. ; Yamamura, K. ; Sano, Y. ; Ueno, K. ; Endo, K. ; Mori, Y. ; Yabashi, M. ; Tamasaku, K. ; Nishino, Y. ; Ishikawa, T. ; Yamauchi, K.
Pub. info.:
Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA. pp.171-180, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ueno, K. ; Iguchi, M. ; Yokoyama, T. ; Oda, N. ; Miyamoto, H. ; Matsubara, Y. ; Horiuchi, T. ; Saito, S.
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Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology. pp.1-8, 2001. Pennington, N.J.. Electrochemical Society
Thin film materials, processes, and reliability : proceedings of the international symposium. pp.167-176, 2001. Pennington, N.J.. Electrochemical Society
Ueno, K. ; Ohkubo, I. ; Matsumoto, Y. ; Okazaki, N. ; Hasegawa, T. ; Itaka, K. ; Koinuma, H.
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Combinatorial and artificial intelligence methods in materials science : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A. pp.67-74, 2002. Warrendale, Pa.. Materials Research Society
Ohkubo, I. ; Matsumoto, Y. ; Ohtani, M. ; Hasegawa, T. ; Ueno, K. ; Itaka, K. ; Parhat, A. ; Kawasaki, M. ; Koinuma, H.
Pub. info.:
Combinatorial and artificial intelligence methods in materials science : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A. pp.61-66, 2002. Warrendale, Pa.. Materials Research Society
Advances in microcrystalline and nanocrystalline semiconductors, 1996 : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.699-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Fujisawa, H. ; Tsuji, T. ; Izumi, S. ; Ueno, K. ; Kamata, I. ; Tsuchida, T. ; Jikimoto, T. ; Izumi, K.
Pub. info.:
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.1297-1300, 2002. Zuerich, Switzerland. Trans Tech Publications
Tsuji, T. ; Izumi, S. ; Ueda, A. ; Fujisawa, H. ; Ueno, K. ; Tsuchida, H. ; Kamata, I. ; Jikimoto, T. ; Izumi, K.
Pub. info.:
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001. pp.1141-1144, 2002. Zuerich, Switzerland. Trans Tech Publications
Izumi, S. ; Fujisawa, H. ; Tawara, T. ; Ueno, K. ; Hiraoka, M.
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Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden. pp.685-688, 2003. Zuerich, Switzerland. Trans Tech Publications
Imamra, H. ; Sugimoto, N. ; Eiho, S. ; Urayama, S. ; Ueno, K. ; Inoue, K.
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Medical Imaging 2002: Visualization, Image-Guided Procedures, and Display. pp.500-509, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ikeda, T. ; Kotani, T. ; Sato, T. ; Ueno, K. ; Matsuoka, R.
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Metrology, Inspection, and Process Control for Microlithography XVII. 2 pp.950-961, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering