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Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.281-294, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.771-771, 1994. Pennington, NJ. Electrochemical Society
McCarthy, C. ; Miyazaki, M. ; Horie, H. ; Okamoto, S. ; Tsuya, H.
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Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.629-640, 1998. Pennington, NJ. Electrochemical Society
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.698-706, 1998. Pennington, NJ. Electrochemical Society
Asayama, E. ; Ono, T. ; Takeshita, M. ; Hourai, M. ; Sano, M. ; Tsuya, H.
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Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.546-556, 1998. Pennington, NJ. Electrochemical Society
Ono, T. ; Asayama, E. ; Horie, H. ; Hourai, M. ; Sueoka, K. ; Tsuya, H. ; Rozgonyi, G.A.
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Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1113-1125, 1998. Pennington, NJ. Electrochemical Society
Kelly, G. P. ; Hourai, M. ; Umeno, S. ; Sano, M. ; Tsuya, H.
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Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.21-, 1998. Warrendale, Pa. MRS - Materials Research Society
Hourai, M. ; Ono, T. ; Umeno, S. ; Tanaka, T. ; Asayaoia, E. ; Nishikawa, H. ; Sano, M. ; Tsuya, H.
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Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.19-34, 2001. Pennington, N.J.. Electrochemical Society
Jablonski, J. ; Miyamura, Y. ; Imai, M. ; Tsuya, H.
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Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices. pp.28-37, 1994. Pennington, NJ. Electrochemical Society