1.

Conference Proceedings
Conference Proceedings
1. Estimation of Point Defect Fundamental Properties Using SOI Structures and Devices
Tsoukalas, D. ; Tsamis, C. ; Kouvatsos, D. ; Skarlatos, D.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.348-358,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-4
2.

Conference Proceedings
Conference Proceedings
2. POINT DEFECT INJECTION IN SILICON DURING THIN OXIDE FORMATION
Skarlatos, D. ; Omri, M. ; Tsamis, C. ; Claverie, A. ; Tsoukalas, D.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.914-925,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
3.

Conference Proceedings
Conference Proceedings
3. Point Defect Injection Kinetics by N2O Oxidation of Silicon
Tsamis, C. ; Kouvatsos, D. N. ; Tsoukalas, D.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.133-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469
4.

Conference Proceedings
Conference Proceedings
4. Estimation of the Number of Injected Interstitial Atoms During Nitrous Oxidation of Silicon
Skarlatos, D. ; Giles, L. F. ; Tsamis, C. ; Claverie, A. ; Tsoukalas, D.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.289-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 568
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Conference Proceedings
Conference Proceedings
5. Annealing Behavior Of Locally Confined Dislocation Loops Under Inert And Oxidizing Ambient
Tsamis, C. ; Skarlatos, D. ; Raptis, I. ; Tsoukalas, D. ; Calvo, P. ; Colombeau, B. ; Cristiano, F. ; Claverie, A.
Pub. info.: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.243-248,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 717
6.

Conference Proceedings
Conference Proceedings
6. Use of Isotopically Pure Silicon Material to Estimate Silicon Diffusivity in Silicon Dioxide
Tsoukalas, D. ; Tsamis, C. ; Normand, P.
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669