1.

Conference Proceedings

Conference Proceedings
Roman, P. ; Lee, D.D. ; Wang, J. ; Mumbauer, P. ; Grant, R. ; Tower, J. ; Kamieniecki, E. ; Lukasiak, L. ; Ruzyllo, aud J.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.207-212,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
2.

Conference Proceedings

Conference Proceedings
Wallace, J. ; Ornstein, I. ; Nezri, M. ; Fryd, Y. ; Bloomberg, S. ; Beem, S. ; Bibi, B. ; Hem, S. ; Perna, S. ; Tower, J. ; Lang, F. ; Villani, T. ; McCarthy, D.R. ; Stabile, P.
Pub. info.: Infrared technology and applications XXIII : 20-25 April, 1997, Orlando, Florida.  Part 1  pp.159-167,  1997.  Bellingham, Wash..  SPIE
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3061