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Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.207-212, 2001. Pennington, N.J.. Electrochemical Society
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Infrared technology and applications XXIII : 20-25 April, 1997, Orlando, Florida. Part 1 pp.159-167, 1997. Bellingham, Wash.. SPIE
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering