Togawa, T. ; Ueda, A. ; Morishige, Y. ; Suzuki, Y.
Pub. info.:
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.346-351, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Wada, Y. ; Togawa, T. ; Kato, H. ; Tsuji, M. ; Tamaura, Y.
Pub. info.:
Materials and processes for environmental protection : symposium held April 5-7, 1994, San Francisco, California, U.S.A.. pp.45-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Togawa, T. ; Wada, Y. ; Yoshida, T. ; Tsuji, M. ; Tamaura, Y.
Pub. info.:
Materials and processes for environmental protection : symposium held April 5-7, 1994, San Francisco, California, U.S.A.. pp.51-, 1994. Pittsburgh, PA. MRS - Materials Research Society