CRYSTALLINITY OF ISOLATED SILICON EPITAXY (ISE) SILICON-ON-INSULATOR LAYERS
- Author(s):
Allen, L. T. P. Zavrachy, P. M. Vu, D. P. Batty, M. W. Henderson, W. R. Boden T. J. Bowen, D. K. Gorden-Smith D. Thomas, C. R. Tjahjadi, T. - Publication title:
- Chemistry and defects in semiconductor heterostructures
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 148
- Pub. Year:
- 1989
- Page(from):
- 409
- Page(to):
- 414
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990210 [1558990216]
- Language:
- English
- Call no.:
- M23500/148
- Type:
- Conference Proceedings
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