Danel, A. ; Lardin, T. ; Kamarinos, G. ; Tardif, F.
Pub. info.:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.394-403, 1997. Pennington, NJ. Electrochemical Society
Tardif, F. ; Joly, J.-P. ; Courteaux, A. ; Straube, U. ; Danel, A. ; Kamarinos, G.
Pub. info.:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.385-393, 1997. Pennington, NJ. Electrochemical Society
Patruno, P. ; Levy, D. ; Fleury, A. ; Tonti, A. ; Tardif, F.
Pub. info.:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.195-205, 1994. Pennington, NJ. Electrochemical Society
Tardif, F. ; Raccurt, O. ; Barbe, J.C. ; De Crecy, F. ; Besson, P. ; Danel, A.
Pub. info.:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.153-160, 2003. Pennington, NJ. Electrochemical Society
Danel, A. ; Straube, U. ; Kamarinos, G. ; Kamieniecki, E. ; Tardif, F.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.400-407, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.120-127, 1997. Pennington, NJ. Electrochemical Society
Patruno, P. ; Fleury, A. ; Wyborn, H. ; Andre, E. ; Tardif, F.
Pub. info.:
Proceedings of the Symposium on Large Area Wafer Growth and Processing for Electronic and Photonic Devices and the twentieth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XX). pp.93-100, 1994. Pennington, NJ. Electrochemical Society
Constant, I. ; Marthon, S. ; Lardin, T. ; David, C. ; Jacquemond, M.N. ; Tardif, F.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.626-633, 1997. Pennington, NJ. Electrochemical Society
Cowache, C. ; Boelen, P. ; Kashkoush, I. ; Besson, P. ; Tardif, F.
Pub. info.:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.59-68, 1999. Pennington, NJ. Electrochemical Society
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.453-460, 1999. Pennington, NJ. Electrochemical Society
Levy, D. ; Tardif, F. ; Maunier, F. ; Pizzetti, C. ; Christenson, K.
Pub. info.:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.121-128, 1999. Pennington, NJ. Electrochemical Society
Paillet, C. ; Joly, J.P. ; Tardif, F. ; Barla, K. ; Patruno, P. ; Levy, D.
Pub. info.:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.366-370, 1995. Pennington, NJ. Electrochemical Society
Tardif, F. ; Beverina, A. ; Bernard, H. ; Constant, I. ; Robin, F. ; Torres, J.
Pub. info.:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.312-319, 1999. Pennington, NJ. Electrochemical Society
Beverina, A. ; Maisonobe, J. C. ; Lardin, T. ; Ermolieff, A. ; Passemard, G. ; Tardif, F.
Pub. info.:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.320-326, 1999. Pennington, NJ. Electrochemical Society
Perrut, V. ; Danel, A. ; Millet, C. ; Daviot, J. ; Rignon, M. ; Tardif, F.
Pub. info.:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.246-253, 2003. Pennington, NJ. Electrochemical Society
Boelen, P. ; Lardin, T. ; Sandrier, B. ; Matthews, R. ; Kashkoush, I. ; Novak, R. ; Tardif, F.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.161-167, 1997. Pennington, NJ. Electrochemical Society
Millet, C. ; Daviot, J. ; Danel, A. ; Perrut, V. ; Tardif, F. ; Broussous, L. ; Renault, O.
Pub. info.:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.271-278, 2003. Pennington, NJ. Electrochemical Society
Shanmugasundaram, K. ; Chang, K. ; Shallenberger, J. ; Danel, A. ; Tardif, F. ; Ruzyllo, J.
Pub. info.:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.348-355, 2003. Pennington, NJ. Electrochemical Society
Tardif, F. ; Joly, J.P. ; Lardin, T. ; Tonti, A. ; Patruno, P. ; Levy, D. ; Sievert, W.
Pub. info.:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.114-122, 1993. Pennington, NJ. Electrochemical Society
Tardif, F. ; Joly, J.P. ; Lardin, T. ; Tonti, A. ; Patruno, P. ; Levy, D. ; Sievert, W.
Pub. info.:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.85-93, 1994. Pennington, NJ. Electrochemical Society
Tardif, F. ; Lardin, T. ; Paillet, C. ; Joly, J.P. ; Fleury, A. ; Patruno, P. ; Levy, D. ; Barla, K.
Pub. info.:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.49-59, 1995. Pennington, NJ. Electrochemical Society
ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.299-315, 1995. Pennington, NJ. Electrochemical Society
Paillet, C. ; Papon, A.M. ; Joly, J.P. ; Tardif, F. ; Levy, D. ; Barla, K. ; Patruno, P.
Pub. info.:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.575-580, 1995. Pennington, NJ. Electrochemical Society
Ollier, E. ; Marthon, S. ; Quagliotti, G. ; Tardif, F.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.447-454, 1997. Pennington, NJ. Electrochemical Society