1.

Conference Proceedings
Conference Proceedings
1. Resonance Ultrasonic Diagnostics of As-Grown and Process-Induced Defects in Cz Silicon
Belyaev, A. ; Tarasov, I. ; Ostapenko, S. ; Koveshnikov, S. ; Kochelap, V.A. ; Beyaev, A.E.
Pub. info.: High Purity Silicon VI : proceedings of the sixth International Symposium.  pp.660-669,  2000.  Bellingham, Wash..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-17
2.

Conference Proceedings
Conference Proceedings
2. Evaluation of the Properties of Polyurethane Pads and their Correlation to the Perfonnance in the CMP Process
Zantye, P. ; Sikder, A. ; Kumar, A. ; Belyaev, A. ; Tarasov, I. ; Ostapenko, S.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.182-189,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21