1.
Conference Proceedings
Oliver,A.D. ; Tanner,D.M. ; Mani,S.S. ; Swanson,S.E. ; Helgesen,K.S. ; Smith,N.F.
Pub. info.:
Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA . pp.242-253, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4558
2.
Conference Proceedings
Smith,N.F. ; Eaton,W.P. ; Tanner,D.M. ; Allen,J.J.
Pub. info.:
MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California . pp.156-164, 1999. Bellingham, Washington. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3880
3.
Conference Proceedings
Tanner,D.M. ; Peterson,K.A. ; Irwin,L.A. ; Tangyunyong,P. ; Miller,W.M. ; Eaton,W.P. ; Smith,N.F. ; Rodgers,M.S.
Pub. info.:
Materials and Device Characterization in Micromachining . pp.215-226, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3512
4.
Conference Proceedings
Walraven,J.A. ; Mani,S.S. ; Fleming,J.G. ; Headley,T.J. ; Kotula,P.G. ; Pimentel,A.A. ; Rye,M.J. ; Tanner,D.M. ; Smith,N.F.
Pub. info.:
MEMS Reliability for Critical Applications . pp.49-57, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4180
5.
Conference Proceedings
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.:
Micromachined Devices and Components IV . pp.171-178, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3514
6.
Conference Proceedings
Tanner,D.M. ; Smith,N.F. ; Bowman,D.J. ; Eaton,W.P. ; Peterson,K.A.
Pub. info.:
Micromachined Devices and Components III . pp.14-23, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3224
7.
Conference Proceedings
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.:
Micromachined Devices and Components IV . pp.431-438, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3514