1.
|
Conference Proceedings
|
Walraven,J.A. ; Soden,J.M. ; Tanner,D.M. ; Tangyunyong,P. ; Cole Jr.,E.I. ; Anderson,R.E. ; Irwin,L.W.
Pub. info.: |
MEMS Reliability for Critical Applications. pp.30-39, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4180 |
|
2.
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Conference Proceedings
|
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.: |
Micromachined Devices and Components IV. pp.171-178, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
3514 |
|
3.
|
Conference Proceedings
|
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.: |
Micromachined Devices and Components IV. pp.431-438, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
3514 |
|