Development of characterization tools for reliability testing of micro-electro-mechanical system actuators
- Author(s):
- Smith,N.F. ( Sandia National Labs. )
- Eaton,W.P.
- Tanner,D.M.
- Allen,J.J.
- Publication title:
- MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3880
- Pub. Year:
- 1999
- Page(from):
- 156
- Page(to):
- 164
- Pub. info.:
- Bellingham, Washington: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434777 [0819434779]
- Language:
- English
- Call no.:
- P63600/3880
- Type:
- Conference Proceedings
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