1.
Conference Proceedings
Smith,N.F. ; Eaton,W.P. ; Tanner,D.M. ; Allen,J.J.
Pub. info.:
MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California . pp.156-164, 1999. Bellingham, Washington. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3880
2.
Conference Proceedings
Tanner,D.M. ; Peterson,K.A. ; Irwin,L.A. ; Tangyunyong,P. ; Miller,W.M. ; Eaton,W.P. ; Smith,N.F. ; Rodgers,M.S.
Pub. info.:
Materials and Device Characterization in Micromachining . pp.215-226, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3512
3.
Conference Proceedings
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.:
Micromachined Devices and Components IV . pp.171-178, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3514
4.
Conference Proceedings
Tanner,D.M. ; Smith,N.F. ; Bowman,D.J. ; Eaton,W.P. ; Peterson,K.A.
Pub. info.:
Micromachined Devices and Components III . pp.14-23, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3224
5.
Conference Proceedings
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.:
Micromachined Devices and Components IV . pp.431-438, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3514