1.

Conference Proceedings

Conference Proceedings
Smith,N.F. ; Eaton,W.P. ; Tanner,D.M. ; Allen,J.J.
Pub. info.: MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California.  pp.156-164,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3880
2.

Conference Proceedings

Conference Proceedings
Tanner,D.M. ; Peterson,K.A. ; Irwin,L.A. ; Tangyunyong,P. ; Miller,W.M. ; Eaton,W.P. ; Smith,N.F. ; Rodgers,M.S.
Pub. info.: Materials and Device Characterization in Micromachining.  pp.215-226,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3512
3.

Conference Proceedings

Conference Proceedings
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.: Micromachined Devices and Components IV.  pp.171-178,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514
4.

Conference Proceedings

Conference Proceedings
Tanner,D.M. ; Smith,N.F. ; Bowman,D.J. ; Eaton,W.P. ; Peterson,K.A.
Pub. info.: Micromachined Devices and Components III.  pp.14-23,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3224
5.

Conference Proceedings

Conference Proceedings
Eaton,W.P. ; Smith,N.F. ; Irwin,L.W. ; Tanner,D.M.
Pub. info.: Micromachined Devices and Components IV.  pp.431-438,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3514