1.

Conference Proceedings

Conference Proceedings
Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T. ; Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.34-45,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
2.

Conference Proceedings

Conference Proceedings
Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T. ; Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.641-648,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
3.

Conference Proceedings

Conference Proceedings
Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K. ; Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.631-640,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
4.

Conference Proceedings

Conference Proceedings
Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K. ; Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.494-502,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186