1.

Conference Proceedings

Conference Proceedings
Kobayashi,S. ; Uno,T. ; Yamamoto,K. ; Tanaka,S. ; Kotani,T. ; Inoue,S. ; Higurashi,H. ; Watanabe,S. ; Yano,M. ; Ohki,S. ; Tsunakawa,K.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.614-621,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings

Conference Proceedings
Sato,K. ; Tanaka,S. ; Fujisawa,T. ; Inoue,S.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.99-107,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
3.

Conference Proceedings

Conference Proceedings
Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T. ; Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.34-45,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
4.

Conference Proceedings

Conference Proceedings
Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T. ; Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.641-648,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
5.

Conference Proceedings

Conference Proceedings
Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K. ; Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.631-640,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
6.

Conference Proceedings

Conference Proceedings
Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K. ; Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.494-502,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
7.

Conference Proceedings

Conference Proceedings
Tanaka,S. ; Nakamura,H. ; Kawano,K. ; Inoue,S.
Pub. info.: Optical Microlithography IX.  Part2  pp.473-484,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726