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15 results

Conference Proceedings

1. CONTROL OF ETCHING IN LASER-CHEMICAL REACTION OF Mn-Zn FERRITE BY MeV ION IMPLANTATION

Lu, Y.F. ; Takai, M. ; Sanda, H. ; Chayahara, A. ; Satou, M. ; Minamisono, T. ; Namba, S.

Pub. info.:	In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.301-306, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	158

Conference Proceedings

2. DIFFUSION OF ATOMS IMPLANTED IN POLY SILICON LAYER ON INSULATOR

Takai, M. ; Izumi, M. ; Yamamoto, T. ; Kinomura, A. ; Gamo, K. ; Minasono, T. ; Namba, S.

Pub. info.:	Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.. pp.341-346, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	106

Conference Proceedings

3. BURIED METAL DEPOSITION ON GALLIUM ARSENIDE BY LASER INDUCED THERMOCHEMICAL REACTION

Tokuda, J. ; Takai, M. ; Gamo, K. ; Namba, S.

Pub. info.:	Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.261-266, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	101

Conference Proceedings

4. MICRO-RBS ANALYSIS OF MASKLESSLY FABRICATED STRUCTURES

Kinomura, A. ; Takai, M. ; Matsuo, T. ; Satou, M. ; Kiuchi, M. ; Fujii, K. ; Namba, S.

Pub. info.:	Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.743-748, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	128

Conference Proceedings

5. LASER INDUCED WET-CHEMICAL ETCHING OF Mn-Zn FERRITE IN H3PO4

Lu, Y.F. ; Takai, M. ; Nagatomo, S. ; Namba, S.

Pub. info.:	Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.339-346, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	129

Conference Proceedings

6. LASER INDUCED CHEMICAL ETCHING OF COMPOSITE STRUCTURE OF FERRITE AND SENDUST

Nagatomo, S. ; Takai, M. ; Lu, Y.F. ; Namba, S.

Pub. info.:	Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.333-338, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	129

Conference Proceedings

7. MULTILAYER ANALYSIS BY FOCUSED MeV ION BEAM

Takai, M. ; Kinomura, A. ; Izumi, M ; Matsunaga, K. ; Inoue, K. ; Gamo, K. ; Satou, M. ; Namba, S.

Pub. info.:	Electronic packaging materials science III : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A.. pp.51-58, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	108

Conference Proceedings

8. SINGLE CRYSTALLINE GERMANIUM ISLAND ON SILICON DIOXIDE BY ZONE MELTING

Takai, M. ; Tanigawa, T. ; Gamo, K. ; Namba, S.

Pub. info.:	Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.397-402, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	23

Conference Proceedings

9. LASER-ASSITED LOCAL ETCHING OF GALLIUM ARSENIDE

Takai, M. ; Tokuda, J. ; Nakai, H. ; Gamo, K. ; Namba, S.

Pub. info.:	Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A.. pp.211-216, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	29

10.

Conference Proceedings

10. EVALUATION OF COMPOSITIONAL CHANGE IN MASKLESSLY DEPOSITED LINES BY MICRO-RBS ANALYSIS

Kinomura, A. ; Takai, M. ; Lu, Y.F. ; Namba, S. ; Satou, M. ; Chayahara, A.

Pub. info.:	Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.311-316, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	157

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