Resonator using polarization beamsplitter prism for microlithography KrF excimer laser
- Author(s):
- Yamanaka,K. ( Matsushita Research Institute Tokyo,Inc. (Japan) )
- Hashidate,Y. ( Matsushita Research Institute Tokyo,Inc. (Japan) )
- Takahashi,H. ( Matsushita Research Institute Tokyo,Inc. (Japan) )
- Furuya,N. ( Matsushita Research Institute Tokyo,Inc. (Japan) )
- Publication title:
- Laser Resonators
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3267
- Pub. Year:
- 1998
- Page(from):
- 296
- Page(to):
- 303
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427069 [0819427063]
- Language:
- English
- Call no.:
- P63600/3267
- Type:
- Conference Proceedings
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