1.

Conference Proceedings

Conference Proceedings
Y. Morikawa ; Y. Kitahata ; T. Yokoyama ; T. Kikuchi ; A. Kawaguchi ; Y. Ohkubo
Pub. info.: EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6533
2.

Conference Proceedings

Conference Proceedings
Y. Morikawa ; T. Suto ; T. Nagai ; Y. Inazuki ; T. Adachi ; Y. Kitahata ; T. Yokoyama ; N. Toyama ; H. Mohri ; N. Hayashi
Pub. info.: EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6533