High-Performance CMP Slurry with CeO2/Resin Abrasive for STI Formation
- Author(s):
- Publication title:
- ULSI process integration 5
- Title of ser.:
- ECS transactions
- Ser. no.:
- 11(6)
- Pub. Year:
- 2007
- Page(from):
- 277
- Page(to):
- 283
- Pages:
- 7
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566775724 [1566775728]
- Language:
- English
- Call no.:
- E23400/11-6
- Type:
- Conference Proceedings
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