Study of Poly-SiGe Structural Properties for Modularly Integrated MEMS
- Author(s):
- Publication title:
- SiGe and Ge, materials, processing, and devices
- Title of ser.:
- ECS transactions
- Ser. no.:
- 3(7)
- Pub. Year:
- 2006
- Page(from):
- 1131
- Page(to):
- 1142
- Pages:
- 12
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 19385862
- ISBN:
- 9781566775076 [1566775078]
- Language:
- English
- Call no.:
- E23400/3-7
- Type:
- Conference Proceedings
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