T. Kimura ; S. Handa ; H. Mimura ; H. Yumoto ; D. Yamakawa
Pub. info.:
Advances in x-ray/EUV optics and components III : 11-13 August 2008, San Diego, California, USA. pp.707709-1-707709-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
S. Handa ; H. Mimura ; S. Matsuyama ; H. Yumoto ; T. Kimura
Pub. info.:
Advances in metrology for x-ray and EUV optics II : 30 August 2007, San Diego, California, USA. pp.670404-1-670404-8, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
H. Mimura ; S. Matsuyama ; H. Yumoto ; S. Handa ; T. Kimura
Pub. info.:
Advances in X-ray/EUV optics, components, and applications II : 27-28 August 2007, San Diego, California, USA. pp.67050L-1-67050L-8, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering