Finetti, M. ; Suni, I. ; DeSanti, G. ; Bacci, L. ; Caprile, C.
Pub. info.:
Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.297-302, 1986. Pittsburgh, Pa.. Materials Research Society
Suni, I. ; Ronkainen, H. ; Eranen,S. ; Murto, T. ; Krontiras, Ch. ; Finetti, M.
Pub. info.:
Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A.. pp.39-44, 1985. Pittsburgh, Pa.. Materials Research Society
Finetti, M. ; Ronkainen, H. ; Blomberg, M. ; Suni, I.
Pub. info.:
Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA. pp.811-816, 1985. Pittsburgh, Pa.. Materials Research Society