Auger Depth Profiling with Good Depth Resolution of Low Energy Implantation Induced Ion Mixing
- Author(s):
- Publication title:
- Materials science applications of ion beam techniques : proceedings of the International Symposium on Materials Science Applications of Ion Beam Techniques, incoeporating the 1st German-Australian Workshop on Ion Beam Analysis, Seeheim, Germany, September 9-12 1996
- Title of ser.:
- Materials science forum
- Ser. no.:
- 248-249
- Pub. Year:
- 1997
- Page(from):
- 245
- Page(to):
- 248
- Pub. info.:
- Zuerich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878497676 [0878497676]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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