1.

Conference Proceedings
Conference Proceedings
1. Shape control using sidewall imaging
Su,B. ; Oshana,R. ; Menaker,M. ; Barak,Y. ; Shi,X.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.232-238,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
2.

Conference Proceedings
Conference Proceedings
2. Spriral growth pattern of high Tc superconducting thin films by laser deposition
Su,B. ; Wang,Y. ; An,C. ; Fan,Y. ; Dai,J. ; Lu,D.
Pub. info.: Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China.  pp.200-204,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3175
3.

Conference Proceedings
Conference Proceedings
3. Pulsed-laser scanning deposition of diamondlike thin films
Wang,Y. ; Wang,Q. ; An,C. ; Su,B.
Pub. info.: Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China.  pp.210-213,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3175
4.

Conference Proceedings
Conference Proceedings
4. Limitation of CD AFM on resist foot detection
Su,B. ; Rajkumar,K.C. ; Agrawal,M.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.151-162,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
5.

Conference Proceedings
Conference Proceedings
5. Automated OPC optimization using in-line CD-SEM
Su,B. ; Menaker,M. ; Haas,N. ; Subramanian,R. ; Singh,B.
Pub. info.: Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA.  pp.80-86,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4181
6.

Conference Proceedings
Conference Proceedings
6. Design of 200-nm,170-nm,and 140-nm DUV contact sweeper high-transmission attenuating phase-shift mask:?.Experimental results
Socha,R.J. ; Shi,X. ; Holman,K.C. ; Dusa,M.V. ; Conley,W. ; Petersen,J.S. ; Chen,J.F. ; Laidig,T.L. ; Wampler,K.E. ; Caldwell,R.F. ; Chu,M.C. ; Su,C. ; Huang,K. ; Chen,C. ; Le,C. ; Pierrat,C. ; Su,B.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.38-54,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
7.

Conference Proceedings
Conference Proceedings
7. Charging control through extraction field
Su,B. ; Harel,O.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.38-41,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
8.

Conference Proceedings
Conference Proceedings
8. Final CD control through slope/sidewall angle correlation with stepper defocus and electrical parametric
Campbell,R.L. ; Su,B. ; Seregely,T.L. ; Wallace,S. ; Schantz,F.H.
Pub. info.: Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK.  pp.91-99,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4405
9.

Conference Proceedings
Conference Proceedings
9. Preparation of superconducting YBa2Cu3O7-x films on metallic substrates by pulsed-laser deposition
Wang,Y. ; Su,B. ; Huang,X. ; Wang,Q.L. ; An,C.W. ; Fan,Y.C. ; Lu,D.S.
Pub. info.: Laser processing of materials and industrial applications II : 16-19 September 1998, Beijing, China.  pp.76-79,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3550
10.

Conference Proceedings
Conference Proceedings
10. Survey of research and applications of laser heat treatment in China
Qian,H. ; Su,B.
Pub. info.: Laser Processing of Materials and Industrial Applications.  pp.2-5,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2888
11.

Conference Proceedings
Conference Proceedings
11. Comprehensive focus-overlay-CD correlation to identify photolithographic performance
Dusa,M.V. ; Dellarochetta,S. ; Fung,A.C. ; Su,B. ; Zavecz,T.E.
Pub. info.: Optical Microlithography IX.  Part2  pp.545-554,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
12.

Conference Proceedings
Conference Proceedings
12. Photolithographic lens characterization of critical dimension variation using empirical focal-plane modeling
Dusa,M.V. ; Su,B. ; Dellarochetta,S. ; Zavecz,T.E.
Pub. info.: Optical Microlithography X.  pp.697-707,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
13.

Conference Proceedings
Conference Proceedings
13. 193-nm photoresist shrinkage after electron-beam exposure
Su,B. ; Eytan,G. ; Romano,A.R.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.695-706,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344
14.

Conference Proceedings
Conference Proceedings
14. Image processing in the AT snapshot mode
Li,Y. ; Su,B.
Pub. info.: International Symposium on Multispectral Image Processing (ISMIP'98).  pp.282-285,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3545