1.

Conference Proceedings
Conference Proceedings
1. Comprehensive focus-overlay-CD correlation to identify photolithographic performance
Dusa,M.V. ; Dellarochetta,S. ; Fung,A.C. ; Su,B. ; Zavecz,T.E.
Pub. info.: Optical Microlithography IX.  Part2  pp.545-554,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
2.

Conference Proceedings
Conference Proceedings
2. Photolithographic lens characterization of critical dimension variation using empirical focal-plane modeling
Dusa,M.V. ; Su,B. ; Dellarochetta,S. ; Zavecz,T.E.
Pub. info.: Optical Microlithography X.  pp.697-707,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051