Properties of Zr-substituted (Ba, Sr)TiO3 thin films for integrated capacitors
- Author(s):
Stauf, G. T. Chen, P. S. Paw, W. Roeder, J. F. Ayguavives, T. Maria, J-P. Kingon, A. I. - Publication title:
- Materials issues for tunable RF and microwave devices : sympowium held November 30-December 2, 1999, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 603
- Pub. Year:
- 2000
- Page(from):
- 131
- Pub. info.:
- Warrendale: MRS-Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995116 [1558995110]
- Language:
- English
- Call no.:
- M23500/603
- Type:
- Conference Proceedings
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