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Properties of Zr-substituted (Ba, Sr)TiO3 thin films for integrated capacitors

Author(s):
Stauf, G. T.
Chen, P. S.
Paw, W.
Roeder, J. F.
Ayguavives, T.
Maria, J-P.
Kingon, A. I.
2 more
Publication title:
Materials issues for tunable RF and microwave devices : sympowium held November 30-December 2, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
603
Pub. Year:
2000
Page(from):
131
Pub. info.:
Warrendale: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558995116 [1558995110]
Language:
English
Call no.:
M23500/603
Type:
Conference Proceedings

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