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Changes in Structure and Composition of Silicon Oxide Thin Films Induced by Ultraviolet Illumination

Author(s):
Parada, E. G.
Gonzalez, P.
Leon, B.
Perez-Amor, M.
Silva, M. F. da
Soares, J. C.
Fernandez, A.
Gonzalez-Elipe, A. R.
3 more
Publication title:
Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
441
Pub. Year:
1997
Page(from):
211
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993457 [1558993452]
Language:
English
Call no.:
M23500/441
Type:
Conference Proceedings

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