1.

Conference Proceedings
Conference Proceedings
1. Dual Spectral Source Rapid Isothermal Processing Assisted CVD as a Unique Activation and Limited Reaction Processing CVD Technique
Singh, R. ; Sharangpani, R. ; Chen, Y.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.213-218,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5
2.

Conference Proceedings
Conference Proceedings
2. High Energy Photon Assisted Rapid Isothermal Processing Based Chemical Vapor Deposition
Singh, R. ; Sharangpani, R. ; Chen, Y.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.187-193,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
3.

Conference Proceedings
Conference Proceedings
3. Direct Liquid Injection Assisted Chemical Vapor Deposition of Low Constant Materials
Sharangpani, R. ; Singh, R. ; Parihar, V. ; Thakur, R.P.S.
Pub. info.: Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues.  pp.15-19,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-8
4.

Conference Proceedings
Conference Proceedings
4. Chemical Vapor-Deposited Teflon Amorphous Fluoropolymer as an Interlevel Dielectric Material for Low Power Integrated Circuits
Sharangpani, R. ; Singh, R.
Pub. info.: Low-dielectric constant materials III : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.207-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 476
5.

Conference Proceedings
Conference Proceedings
5. Novel Applications of Rapid Photothermal Chemical Vapor Deposition
Singh, R. ; Parihar, V. ; Chen, Y. ; Poole, K. F. ; DeBoer, S. ; Thakur, R. P. S. ; Sharangpani, R. ; Vasudev, P. K.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.339-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
6.

Conference Proceedings
Conference Proceedings
6. How Rapid Isothermal processing Can Be a Dominant Semiconductor Processing Technology in the 21st Century
Singh, R. ; Sharangpani, R. ; Cherukuri, K. C. ; Chen, Y. ; Dawson, D. W. ; Poole, K. F. ; Rohatgi, A. ; Narayanan, S. ; Thakur, R. P. S.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.81-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429
7.

Conference Proceedings
Conference Proceedings
7. DEPOSITION OF OXIDE BASED ADVANCED ELECTRONIC AND OPTICAL MATERIALS BY RAPID ISOTHERMAL PROCESSING (RIP) ASSISTED METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD)
Mavoori, J. ; Singh, R. ; Sharangpani, R. ; Gong, C. ; Poole, K. F. ; Singh, R. K. ; Natarajan, R.
Pub. info.: Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A..  pp.201-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 342
8.

Conference Proceedings
Conference Proceedings
8. Low Thermal Budget Processing of Organic Dielectrics
Sharangpani, R. ; Singh, R. ; Cherukuri, K. C. ; Thakur, R. P. S.
Pub. info.: Low-dielectric constant materials : synthesis and applications in microelectronics : symposium held April 17-19, 1995, San Francisco, California, U.S.A..  pp.117-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 381