1.

Conference Proceedings
Conference Proceedings
1. Nikon EB Stepper: the latest development status
Suzuki,K. ; Fujiwara,T. ; Hada,K. ; Hirayanagi,N. ; Kawata,S. ; Morita,K. ; Okamoto,K. ; Okino,T. ; Shimizu,S. ; Yahiro,T. ; Yamamoto,H.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.80-87,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings
Conference Proceedings
2. Data of scattered electron characteristics in 1OO-kV EB stepper
Morita,K. ; Yahiro,T. ; Shimizu,S. ; Yamamoto,H. ; Hirayanagi,N. ; Fujiwara,T. ; Suzuki,S. ; Shimizu,H. ; Kawata,S. ; Okino,T. ; Suzuki,K.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.703-712,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
3.

Conference Proceedings
Conference Proceedings
3. Investigation of proximity effect correction in electron projection lithography(EPI)
Okino,T. ; Suzuki,K. ; Okamoto,K. ; Kawata,S. ; Uchikawa,K. ; Suzuki,S. ; Shimizu,S. ; Fujiwara,T. ; Yamada,A. ; Kamijo,K.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.235-244,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
4.

Conference Proceedings
Conference Proceedings
4. Nikon EB stepper:its system concept and countermeasures for critical issues
Suzuki,K. ; Fujiwara,T. ; Hada,K. ; Hirayanagi,N. ; Kawata,S. ; Morita,K. ; Okamoto,K. ; Okino,T. ; Shimizu,S. ; Yahiro,T.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.214-224,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997