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Experimental determination of micromachined discrete and continuous device spring constants using nanoindentation method

Author(s):
Chan, M.L. ( National Univ. of Singapore )
Tay, F.E.H.
Logeeswaran, V.J.
Zeng, K.Y. ( Institute of Materials Research and Engineering (Singapore) )
Shen, L.
Chau, F.S. ( National Univ. of Singapore )
1 more
Publication title:
Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4755
Pub. Year:
2002
Page(from):
726
Page(to):
735
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819445186 [0819445185]
Language:
English
Call no.:
P63600/4755
Type:
Conference Proceedings

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