1.

Conference Proceedings
Conference Proceedings
1. Shallow Junction Formation by Small Cluster Implantation
Lu, X. ; Shao, L. ; Wang, X. ; Chen, Q. ; Liu, J. ; Chu, W.K. ; Bennett, J. ; Larson, L.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.337-344,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
2.

Conference Proceedings
Conference Proceedings
2. Ultra-Shallow Junction Formation Via Thermal diffusion of Boron into High Energy Ion Irradiated Silicon
Shao, L. ; Lu, X.M. ; Wang, X.M. ; Liu, J.R. ; Chu, W.K.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.305-310,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9