1.

Conference Proceedings
Conference Proceedings
1. Stability of Shallow Junctions: Issue and Solution
Shao, L. ; Thompson, P.E. ; Wang, X.M ; Chen, H. ; Liu, J.R. ; Chu, W.-K.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.82-89,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01
2.

Conference Proceedings
Conference Proceedings
2. Stability of Ultra-Shallow Junctions Formed by 0.2 keV Boron Implantation and Spike Annealing
ang, J. Bennett ; L., Larsen ; I., Rusakova ; H., Chen ; J., Lia ; W.-K., Chu ; Shao, L. ; Wang, X. ; Bennett, J. ; Larsen, L. ; Rusakova, I. ; Chen, H. ; Lia, J. ; Chu, W.-K.
Pub. info.: Rapid thermal and other short-time processing technologies III : proceedings of the international symposium.  pp.333-338,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-11