1.

Conference Proceedings
Conference Proceedings
1. Shallow Junction Formation by Small Cluster Implantation
Lu, X. ; Shao, L. ; Wang, X. ; Chen, Q. ; Liu, J. ; Chu, W.K. ; Bennett, J. ; Larson, L.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.337-344,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
2.

Conference Proceedings
Conference Proceedings
2. Stability of Ultra-Shallow Junctions Formed by 0.2 keV Boron Implantation and Spike Annealing
ang, J. Bennett ; L., Larsen ; I., Rusakova ; H., Chen ; J., Lia ; W.-K., Chu ; Shao, L. ; Wang, X. ; Bennett, J. ; Larsen, L. ; Rusakova, I. ; Chen, H. ; Lia, J. ; Chu, W.-K.
Pub. info.: Rapid thermal and other short-time processing technologies III : proceedings of the international symposium.  pp.333-338,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-11