1.

Conference Proceedings
Conference Proceedings
1. Mainstreaming SOI CMOS technology
Shahidi,G.G.
Pub. info.: Microelectronic Device Technology III.  pp.15-21,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3881
2.

Conference Proceedings
Conference Proceedings
2. Mainstreaming SOI CMOS technology
Shahidi,G.G.
Pub. info.: Multilevel Interconnect Technology III.  pp.15-21,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3883
3.

Conference Proceedings
Conference Proceedings
3. Mainstreaming SOI CMOS technology
Shahidi,G.G.
Pub. info.: In-Line Methods and Monitors for Process and Yield Improvement.  pp.15-21,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3884