1.

Conference Proceedings
Conference Proceedings
1. Predictive Simulation of Void Formation during the Deposition of Silicon Nitride and Silicon Dioxide Films
Heitzinger, C. ; Sheikholeslanii, A. ; Puchner, H. ; Selberherr, S.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium.  pp.356-368,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-2
2.

Conference Proceedings
Conference Proceedings
2. A Case Study in Predictive Three-Dimensional Topography Simulation Based on a Level-Set Algorithm
Heitzinger, C. ; Sheikholeslami, A. ; Fugger, J. ; Haberlen, O. ; Leicht, M. ; Selberherr, S.
Pub. info.: Electrochemical processes in ULSI and MEMS : proceedings of the international symposium.  pp.132-144,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-17
3.

Conference Proceedings
Conference Proceedings
3. Simulation of void formation in interconnect lines
Sheikholeslami, A. ; Heitzinger, C. ; Puchner, H. ; Badrieh, F. ; Selberherr, S.
Pub. info.: VLSI Circuits and Systems.  pp.445-452,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5117