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COMPENSATION IN EPITAXIAL CUBIC SiC FILMS

Author(s):
Segall, B. ( NASA )  
Publication title:
NASA Technical Reports
Pub. Year:
1986
Issue:
NASA-TM-87269
No.:
G3/76 43035
Pt.:
NAS1.15:87269
Paper no.:
N86-25267
Page(from):
1
Page(to):
12
Pages:
12
Pub. info.:
National Aeronautics and Space Administration
Language:
English
Type:
Technical Paper

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