1.

Conference Proceedings

Conference Proceedings
Metev, S. ; Stephen, A. ; Schwarz, J. ; Wochnowski, C.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.390-395,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
2.

Conference Proceedings

Conference Proceedings
Metev, S. ; Stephen, A. ; Schwarz, J. ; Wochnowski, C.
Pub. info.: Laser-Assisted Micro- and Nanotechnologies 2003.  pp.21-26,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5399