1.

Conference Proceedings
Conference Proceedings
1. Polymeric optical MEMS
Hossfeld,J. ; Paatzsch,T. ; Schulze,J. ; Neumeier,M. ; Weber,L. ; Bauer,H.-D. ; Ehrfeld,W.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part2  pp.637-645,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680
2.

Conference Proceedings
Conference Proceedings
2. Miniaturized fiber optical switches with nonmoving polymeric mirrors for tele- and data-communication networks fabricated using the LIGA technology
Neumeier,M. ; Ehrfeld,W. ; Jager,J. ; Picard,A. ; Schulze,J.
Pub. info.: Miniaturized Systems with Micro-Optics and Micromechanics III.  pp.37-47,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3276