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Combination of Different Methods to Characterize Micromechanical Sensors

Author(s):
Buchhold, R.
Buttner, U.
Nakladal, A.
Sager, K.
Hack, E.
Bronnimann, R.
Sennhauser, U.
Schroth, A.
3 more
Publication title:
Materials for smart systems II : sympsoium held December 2-5, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
459
Pub. Year:
1997
Page(from):
243
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993631 [1558993630]
Language:
English
Call no.:
M23500/459
Type:
Conference Proceedings

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