Blank Cover Image

CVD-Epitaxial Growth on Porous Si for ELTRAN SOl-Epi Wafers

Author(s):
Publication title:
CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-13
Pub. Year:
2000
Page(from):
435
Page(to):
441
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772785 [1566772788]
Language:
English
Call no.:
E23400/200013
Type:
Conference Proceedings

Similar Items:

Yonehara, T., Sakaguchi, K.

Electrochemical Society

Sakaguchi, Tyonehara; K, Sato, N

Electrochemical Society

2 Conference Proceedings ELTRAN (SOI-Epi Wafer) Technology

Yonehara, T., Sakaguchi, K.

Kluwer Academic Publishers

Yonehara, T., Sakaguchi, K., Sato, N.

Electrochemical Society

Sato, N., Sakaguchi, K., Yamagata, K., Fujiyama, Y., Yonehara, T.

Electrochemical Society

Tamaoki, N., Sato, Y.

Electrochemical Society

Sakaguchi, K., Yonehara, T.

Electrochemical Society

Sato, Y., Ohmine, T., Saito, Y.

Electrochemical Society

5 Conference Proceedings ELTRAN by Splitting Porous Si Layers

Sakaguchi, K, Yanagita, Y, Kurisu, H, Suzuki, H, Obmi, K, Yonehara, T

Electrochemical Society

Isaj, H., Nakayama, J., Yonehara, T.

Electrochemical Society

Sakaguchi, K., Tsuboi, T., Yanagita, K., Okabe, T., Takahashi, K., Sato, N.

Electrochemical Society

Shishkin, Y., Ke, Y., Yan, F., Devaty, R.P., Choyke, W.J., Saddow, S.E.

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12