Native and Stress-Induced Traps in SiO2 Films

Native and Stress-Induced Traps in SiO2 Films

Author(s):

Ghetti, A.

Publication title:

The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2000-2

Pub. Year:

2000

Page(from):

419

Page(to):

430

Pages:

12

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772679 [1566772672]

Language:

English

Call no.:

E23400/2000-2

Type:

Conference Proceedings

Details

TDL ID:	ZA00013971
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface
Conf. info. (Number):	4th
Conf. info. (Venue):	Tronto, Canada
Conf. info. (Date):	2000.05.15-2000.05.18

Similar Items:

1 Conference Proceedings Soft Breakdown in Ultrathin Oxides Weir, B. E., Silverman, P. J., Alers, G. B., Monroe, D., Alam, M. A., Sorsch, T. W., Green, M. L., Timp, G. L., Ma, Y., … MRS - Materials Research Society	7 Conference Proceedings Nanoscale Electronic Devices The Nano-Transistor Timp, G., Baumann, F., Bude, J., Bourdelle, K.K., Green, M., Grazul, J., Chetti, A., Forsyth, G., Kleiman, R., Kiemens, … Electrochemical Society
2 Conference Proceedings Physics and Prospects of Sub-2 urn Oxides Alam, M.A., Weir, B., Silverman, P., Bude, J., Chetti, A., Ma, Y., Brown, M.M., Hwang, D., Hamad, A. Electrochemical Society	8 Conference Proceedings Competition Between Gettering by Implantation-Induced Cavities in Silicon and Internal Gettering Associated with SiO2 Precipitation McHugo, S. A., Weber, E. R., Myers, S. M., Petersen, G. A. MRS - Materials Research Society
3 Conference Proceedings The effect of laser pulse duration on laser-induced damage in KDP and SiO₂ C.W. Carr, M.J. Matthews, J.D. Bude, M.L. Spaeth SPIE - The International Society of Optical Engineering	9 Conference Proceedings Competition Between Gettering by Implantation-Induced Cavities in Silicon and Internal Gettering Associated With SiO2 Precipitation McHugo, S. A., Weber, E. R., Myers, S. M., Petersen, G. A. MRS - Materials Research Society
4 Conference Proceedings Non-Idealities in the Characterization of Thin SiO2 Films Using Capacitance-Voltage Techniques Krisch, K.S., Bude, J., Manchanda, L. Electrochemical Society	10 Conference Proceedings Comparative Study of Experimental Techniques for Boron Profiling at Poly-Si/SiO2 Interface Furtsch, M., Bevk, J., Bude, J., Downey, S. W., Krisch, K. S., Moriya, N., Silverman, P. J., Luftman, H. S. MRS - Materials Research Society
5 Conference Proceedings Native and Irradiation-Induced Defects in SiO2 Structures Studied by Positron Annihilation Techniques Rivera, A., Montilla, I., Alba Garcia, A., Escobar Galindo, R., Falub, C.V., van Veen, A., Schut, H., de Nijs, J.M.M., … Trans Tech Publications	11 Conference Proceedings A NEW TWO-STEP PLASMA-ASSISTED SURFACE CLEANING-OXIDATION AND FILM-DEPOSITION PROCESS SEQUENCE FOR THE FORMATION OF Si(100)/SiO2 INTERFACES WITH LOW DENSITIES … Ma, Y., Yasuda, T., Habermehl, S., He, S.S., Stephens, D.J., Lucovsky, G. Materials Research Society
6 Conference Proceedings Toward the ultimate storage device: the fabrication of an ultrahigh-density memory device with 193-nm lithography Cirelli, R. A., Bude, J., Mansfield, W. M., Timp, G. L., Klemens, F. P., Watson, C. P., Weber, G. R., Sweeney, J R., … SPIE - The International Society of Optical Engineering	12 Conference Proceedings INTRINSIC GROWTH STRESS IN THERMALLY GROWN AND ANNEALED SiO2 THIN FILMS: CONTROL OF STRESS-INDUCED ELECTRONICALLY ACTIVE DEFECTS AT Si/SiO2 INTERFACES Bjorkman, C.H., Lee, D.R., Lucovsky, G. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12