DIRECT PATTERNING OF QUARTZ SUBSTRATES BY LASER ABLATION USING VUV ANTI-STOKES RAMAN PULSES

DIRECT PATTERNING OF QUARTZ SUBSTRATES BY LASER ABLATION USING VUV ANTI-STOKES RAMAN PULSES

Author(s):

Sugioka, K.

Publication title:

Laser ablation in materials processing : fundamentals and applications : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

285

Pub. Year:

1993

Page(from):

225

Page(to):

230

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991804 [1558991808]

Language:

English

Call no.:

M23500/285

Type:

Conference Proceedings

Details

TDL ID:	ZA00015769
Series ID:	PA00000011
Conf. info. (Name):	Symposium on laser ablation in materials processing
Conf. info. (Number):	1992
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1992.12.01-1992.12.04

Similar Items:

1 Conference Proceedings High-order anti-Stokes stimulated Raman scattering with injection techniques S. Wada, K. Sugioka, H. Tashiro, K. Toyoda Society of Photo-optical Instrumentation Engineers	7 Conference Proceedings Planarization of hexagonal-GaN(0001)by KrF excimer-laser ablation followed by hydrochloric acid treatment Akane,T., Sugioka,K., Ogino,H., Takai,H., Midorikawa,K. SPIE - The International Society for Optical Engineering
2 Conference Proceedings Precision laser ablation of wide-band-gap materials using VUV-UV multiwavelength excitation Sugioka,K., Zhang,J., Wada,S., Tashiro,H., Midorikawa,K. SPIE - The International Society for Optical Engineering	8 Conference Proceedings Laser-induced surface doping of semiconductors Sugioka,K., Toyoda,K., Jyumonji,M., Takai,H. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Precise microfabrication of wide-bandgap materials by VUV-UV multiwavelength ablation (Invited Paper) Sugioka,K., Zhang,J., Wada,S., Tashiro,H., Midorikawa,K., Toyoda,K. SPIE-The International Society for Optical Engineering	9 Conference Proceedings F2 laser ablation of GaN Akane,T., Sugioka,K., Nomura,S., Hammura,K., Obata,K., Aoki,N., Toyoda,K., Aoyagi,Y., Midorikawa,K. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Si supply mechanism and simulation of composition profiles in excimer laser implant deposition of stainless steel M. Jyumonji, K. Sugioka, H. Takai, H. Tashiro, K. Toyoda Society of Photo-optical Instrumentation Engineers	10 Conference Proceedings Optical diagnostics in laser-induced plasma-assisted ablation of fused quartz Hong,M.H., Sugioka,K., Lu,Y.F., Midorikawa,K., Chong,T.C. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Dynamics study of multiwavelength excitation process using F2 and KrF excimer lasers Obata, K., Sugioka, K., Inamura, T., Takai, H., Toyoda, K., Midorikawa, K. SPIE-The International Society for Optical Engineering	11 Conference Proceedings TiN growth by hybrid radical beam-PLD for Si barrier metal Obata,K., Sugioka,K., Toyoda,K., Takai,H., Midorikawa,K. SPIE - The International Society for Optical Engineering
6 Conference Proceedings High-speed and efficient control of refractive index change of fused silica by multiwavelength excitation process using F2 and KrF excimer lasers Obata, K., Sugioka, K., Kono, T., Takai, H., Toyoda, K., Midorikawa, K. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Pulsed laser nitridation of InP Aoki,N., Akane,T., Sugioka,K., Toyoda,K., Dubowski,J.J., Midorikawa,K. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12