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Reactive Ion-Beam Etching of GaN Grown by MOVPE

Author(s):
Saotome, K.
Matsutani, A.
Shirasawa, T.
Mori, M.
Honda, T.
Sakaguchi, T.
Koyama, F.
Iga, K.
3 more
Publication title:
III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
449
Pub. Year:
1997
Page(from):
1029
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993532 [1558993533]
Language:
English
Call no.:
M23500/449
Type:
Conference Proceedings

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