1.

Conference Proceedings

Conference Proceedings
Shimodaira,N. ; Saito,K. ; Ikushima,A.J. ; Kamihori,T. ; Yoshizawa,S.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1553-1559,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings

Conference Proceedings
Ikushima,A.J. ; Kakiuchida,H. ; Saito,K.
Pub. info.: Optoelectronic Information Systems and Processing.  pp.95-100,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4513