von Bardeleben, H.J. ; Cantin, J.L. ; Mynbaeva, M. ; Saddow, S.E. ; Shishkin, Y. ; Devaty, R.P. ; Choyke, W.J.
Pub. info.:
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.39-54, 2003. Pennington, N.J.. Electrochemical Society
von Bardeleben, H.J. ; Cantin, J.L. ; Mynbaeva, M. ; Saddow, S.E.
Pub. info.:
Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden. pp.495-498, 2003. Zuerich, Switzerland. Trans Tech Publications