Shishkin, Y. ; Ke, Y. ; Yan, F. ; Devaty, R.P. ; Choyke, W.J. ; Saddow, S.E.
Pub. info.:
Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005. pp.255-258, 2006. Stafa-Zuerich. Trans Tech Publications
von Bardeleben, H.J. ; Cantin, J.L. ; Mynbaeva, M. ; Saddow, S.E. ; Shishkin, Y. ; Devaty, R.P. ; Choyke, W.J.
Pub. info.:
Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.39-54, 2003. Pennington, N.J.. Electrochemical Society