1.
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Conference Proceedings
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K. Otsubo ; S. Yamaguchi ; Y. Arisawa ; H. Mukai ; T. Kotani ; H. Mashita ; H. Hashimoto ; T. Kamo ; T. Tsutsui ; O. Ikenaga
Pub. info.: |
Photomask and next-generation lithography mask technology XIV. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6607 |
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2.
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Conference Proceedings
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S. Miyoshi ; S. Yamaguchi ; T. Hirano ; H. Mashita ; H. Mukai
Pub. info.: |
Photomask technology 2008. 1 pp.71220P-1-71220P-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
7122 |
|
3.
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Conference Proceedings
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K. Hashimoto ; H. Mukai ; S. Miyoshi ; S. Yamaguchi ; H. Mashita
Pub. info.: |
Lithography Asia 2008. 2 pp.714022-1-714022-10, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
7140 |
|
4.
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Conference Proceedings
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S. Yamaguchi ; E. Yamanaka ; H. Mukai ; T. Kotani ; H. Mashita
Pub. info.: |
Photomask technology 2007. 2 pp.673036-1-673036-12, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
6730 |
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