1.

Conference Proceedings

Conference Proceedings
S. K. Kim ; S. H. Lim ; D. Kim ; S. R. Koh ; M. Kim ; H. C. Yoon ; D. S. Uh ; J. S. Kim ; T. Chang
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519
2.

Conference Proceedings

Conference Proceedings
S. K. Kim ; H. M. Cho ; C. Woo ; S. R. Koh ; M. Kim
Pub. info.: Lithography Asia 2008.  2  pp.71402V-1-71402V-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
3.

Conference Proceedings

Conference Proceedings
S. K. Kim ; H. M. Cho ; S. R. Koh ; M. Kim ; H. C. Yoon
Pub. info.: Advances in resist materials and processing technology XXV.  2  pp.69232Q-1-69232Q-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6923