1.

Conference Proceedings

Conference Proceedings
J. Damlencourt ; Y. Campidelli ; T. Nguyen ; B. Vincent ; C. Le Royer ; Y. Morand ; S. Cristoloveanu ; L. Clavelier
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 3 : new materials, processes and equipment.  pp.65-72,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(1)
2.

Conference Proceedings

Conference Proceedings
J. Damlencourt ; Y. Campidelli ; M. Roure ; B. Vincent ; E. Martinez ; F. Fillot ; B. Arrazat ; T. Nguyen ; S. Cristoloveanu ; L. Clavelier ; Y. Morand
Pub. info.: Silicon-on-insulator technology and devices 13.  pp.315-320,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(4)